Conventional SEM

Sensitivity to Light and Heat

Conventional secondary and backscattered electron detectors use light sensitive components as part of the detection chain. They also include materials that do not tolerate high temperatures. As a result, they are not suitable for a wide range of applications. They cannot be used to observe fluorescent, cathodoluminescent, or incandescent samples. They are limited, either directly, by transferred heat or, indirectly, by sample incandescence, in their ability to observe hot samples. They preclude the use of light microscopy for collateral observations. Finally, they prevent the use of a sample viewport and chamber illuminator during electron image acquisition.